Title :
Modeling of non-linear polysilicon resistors for analog circuit design
Author :
Virkus, Rob ; Weiser, Doug ; Green, Keith ; Richardson, Donald ; Westphal, Glenn
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
Abstract :
This paper focuses on modeling the effect of the silicide-silicon interface within a polysilicon resistor head that is typical of silicon process technologies used for precision analog circuit design. This interface introduces resistor nonlinearity over bias which can be detrimental to circuit performance, e.g. by manifesting circuit distortion. A nonlinear resistor model suitable for high-frequency circuit simulation and a methodology for obtaining model parameters are provided
Keywords :
circuit simulation; elemental semiconductors; integrated circuit design; interface structure; resistors; semiconductor device measurement; semiconductor device models; silicon; Si; analog circuit design; circuit distortion; circuit performance; high-frequency circuit simulation; model parameters; modeling; nonlinear polysilicon resistor modeling; nonlinear resistor model; polysilicon resistor head; resistor bias; resistor nonlinearity; silicide-silicon interface; silicon process technologies; Analog circuits; Current measurement; Electrical resistance measurement; Immune system; Linearity; Polynomials; Resistors; SPICE; Silicon; Voltage;
Conference_Titel :
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Conference_Location :
Kobe
Print_ISBN :
0-7803-6511-9
DOI :
10.1109/ICMTS.2001.928643