A study of measurement system noise for sensitive soft breakdown triggering

Author

Schmitz, Jurriaan ; Tuinhout, Hans P.

Author_Institution

Philips Res. Lab., Eindhoven, Netherlands

fYear

2001

fDate

2001

Firstpage

99

Lastpage

102

Abstract

This work discusses a simple and effective method to determine the short-term repeatability of current measurements over a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area MOS capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection

Keywords

MOS capacitors; MOS integrated circuits; MOSFET; current fluctuations; integrated circuit measurement; integrated circuit noise; integrated circuit reliability; integrated circuit testing; semiconductor device breakdown; SiO₂; background fluctuations; constant voltage stress; current measurements; current range; large area MOS capacitor; measurement system noise; sensitive soft breakdown triggering; short-term repeatability; soft breakdown detection; soft breakdown signal; Automatic testing; Breakdown voltage; Current measurement; Dielectric breakdown; Electric breakdown; Fluctuations; Instruments; MOS capacitors; Noise measurement; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on

Conference_Location

Kobe

Print_ISBN

0-7803-6511-9

Type

conf

DOI

10.1109/ICMTS.2001.928645

Filename

928645