DocumentCode :
3176314
Title :
Weighted principal component analysis and its applications to improve FDC performance
Author :
Yue, H. Henry ; Tomoyasu, Masayuki
Author_Institution :
Tokyo Electron AT Ltd, Yamanashi, Japan
Volume :
4
fYear :
2004
fDate :
14-17 Dec. 2004
Firstpage :
4262
Abstract :
This paper discusses several practical issues encountered when applying principal component analysis (PCA) to fault detection and classification (FDC). Those issues presented a challenge to the success of PCA-model based process monitoring. Weighted PCA is proposed to address the issues. Two forms of weighted PCA are discussed: sample-wise and variable-wise. Sample-wise weighted PCA is used to address issues with model updating. By adapting models with process changes, the long-term validity of a PCA model can be maintained. We also propose to deal with drift and shift features separately. Variable-wise weighted PCA is used to incorporate process and sensor knowledge. PCA models built this way require less maintenance and result in better FDC performance. We performed comparison studies on plasma etcher FDC. We have shown that weighted PCA can adapt to process drift, reduce the occurrence of false alarms and make the models easy to maintain.
Keywords :
fault diagnosis; principal component analysis; semiconductor device manufacture; sputter etching; false alarms; fault classification; fault detection; plasma etcher; process changes; process drift; process knowledge; process shift; sample-wise weighted principal component analysis; sensor knowledge; variable-wise weighted principal component analysis; Electrical fault detection; Etching; Fault detection; Integrated circuit manufacture; Integrated circuit yield; Monitoring; Plasma applications; Plasma materials processing; Principal component analysis; Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Decision and Control, 2004. CDC. 43rd IEEE Conference on
ISSN :
0191-2216
Print_ISBN :
0-7803-8682-5
Type :
conf
DOI :
10.1109/CDC.2004.1429421
Filename :
1429421
Link To Document :
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