DocumentCode

3176320

Title

Focused ion beam fabrication of photonic crystal structures

Author

Hill, M. ; Cryan, M. ; Heard, P. ; Varrazza, R. ; Yu, S. ; Rorison, J.M.

Author_Institution

University of Bristol

fYear

2003

fDate

22-27 June 2003

Firstpage

390

Lastpage

390

Keywords

Circuits; Crystalline materials; Fabrication; Focusing; Ion beams; Lattices; Lithography; Photonic crystals; Semiconductor lasers; Sputter etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on

Print_ISBN

0-7803-7734-6

Type

conf

DOI

10.1109/CLEOE.2003.1313453

Filename

1313453