• DocumentCode
    3176325
  • Title

    A new approach to characterize substrate losses of on-chip inductors

  • Author

    Schimpf, Klaus ; Benna, Bernhard ; Proetel, Dieter

  • Author_Institution
    Texas Instrum. Deutschland GmbH, Freising, Germany
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    115
  • Lastpage
    118
  • Abstract
    A new approach to characterize substrate losses of on-chip inductors is presented, that attributes the losses to a frequency dependence of the series resistor RS of the equivalent circuit. The technique to extract RS(f) from y-parameters is described in detail. To demonstrate the important role of deembedding for accurate parameter extraction, several deembedding procedures are depicted and compared. As an example, results of a 5-turn inductor are discussed
  • Keywords
    equivalent circuits; inductors; integrated circuit packaging; losses; resistors; deembedding; deembedding procedures; equivalent circuit; inductor; losses; on-chip inductors; parameter extraction; series resistor frequency dependence; substrate losses; y-parameters; Contact resistance; Dielectric substrates; Electrical resistance measurement; Equivalent circuits; Frequency dependence; Inductors; Lead; Parasitic capacitance; Resonance; Skin effect;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
  • Conference_Location
    Kobe
  • Print_ISBN
    0-7803-6511-9
  • Type

    conf

  • DOI
    10.1109/ICMTS.2001.928648
  • Filename
    928648