• DocumentCode
    3176421
  • Title

    Fabrication and optical characterization, of 2-dimensional Si3N4 waveguides

  • Author

    Pucker, G. ; Crivellari, M. ; Bellutti, P. ; Lui, A. ; Daldosso, N. ; Cella, S. ; Girardini, M. ; Prakash, V.G. ; Pavesi, L.

  • Author_Institution
    ITC-IRST
  • fYear
    2003
  • fDate
    22-27 June 2003
  • Firstpage
    397
  • Lastpage
    397
  • Keywords
    Atomic force microscopy; Optical attenuators; Optical device fabrication; Optical refraction; Optical variables control; Optical waveguides; Planar waveguides; Rectangular waveguides; Scanning electron microscopy; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
  • Print_ISBN
    0-7803-7734-6
  • Type

    conf

  • DOI
    10.1109/CLEOE.2003.1313460
  • Filename
    1313460
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3176421