A novel electrostatic servo capacitive vacuum sensor

Author

Wang, Yuelin ; Esashi, M.

Author_Institution

Dept. of Inf. & Electron. Eng., Zhejiang Univ., Hangzhou, China

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1457

Abstract

A novel electrostatic servo capacitive vacuum sensor has been successfully fabricated using p⁺⁺ silicon etch-stop and vacuum anodic bonding techniques. In order to maintain the reference cavity in high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure response of the sensor is good. The servo voltage vs pressure is measured and theoretical data agrees with the experimental results

Keywords

capacitance measurement; electric sensing devices; electrostatic devices; etching; getters; micromachining; microsensors; servomechanisms; vacuum gauges; vacuum measurement; Si; capacitive vacuum sensor; dynamic range; electrostatic vacuum sensor; nonevaporable getter; p⁺⁺ Si etch-stop; pressure response; reference cavity; servo system; small vacuum pump; vacuum anodic bonding technique; Bonding; Capacitive sensors; Dynamic range; Electrostatics; Etching; Gettering; Sensor systems; Servomechanisms; Silicon; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635739

Filename

635739