• DocumentCode
    3177740
  • Title

    Accurate topography measurement of large flat surfaces

  • Author

    Peter, F. ; Krey, S. ; Dumitrescu, E. ; Weingärtner, I. ; Wurm, M. ; Winkler, H.

  • Author_Institution
    TRIOPTICS GmbH, Wedel, Germany
  • fYear
    2003
  • fDate
    22-27 June 2003
  • Firstpage
    467
  • Abstract
    A new technology for the precise topography measurement of reflecting flat surfaces is presented in this paper. The instrument is capable of scanning large flats of about 500 mm2. The instrument consists of a sensor head, which is an angle-measuring device, based on a CCD camera or a position sensitive detector (PSD). The sensor head includes a pentagon prism that reduces the pitch error in scan direction by a factor of about 100.
  • Keywords
    CCD image sensors; angular measurement; optical prisms; optical sensors; surface topography measurement; CCD camera; angle-measuring device; flat surfaces; pentagon prism; pitch error; position sensitive detector; sensor head; topography measurement; Apertures; Charge coupled devices; Charge-coupled image sensors; Instruments; Liquid crystal displays; Optical collimators; Position sensitive particle detectors; Silicon; Spatial resolution; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
  • Print_ISBN
    0-7803-7734-6
  • Type

    conf

  • DOI
    10.1109/CLEOE.2003.1313530
  • Filename
    1313530
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3177740