DocumentCode
3178047
Title
Interferometric 3-D position measurement system
Author
Barron, R. ; Cheung, D. ; Barnes, T.
Author_Institution
Dept. of Phys., Auckland Univ., New Zealand
fYear
2003
fDate
22-27 June 2003
Firstpage
485
Abstract
In this paper, we have developed an interferometeric system for measuring three-dimensional position, which measure x, y and z directions separately. This system produces a single data set from which all three positions can be derived analytically. The zero position of the system does not need to be reset before a measurement can be made, and the position does not require tracking between measurements.
Keywords
light interferometry; measurement errors; optical sensors; position measurement; interferometric system; measurement error; three-dimensional position measurement; zero position; Arm; Difference equations; Interference; Least squares methods; Mirrors; Optical imaging; Optical interferometry; Phase measurement; Phase shifting interferometry; Position measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN
0-7803-7734-6
Type
conf
DOI
10.1109/CLEOE.2003.1313548
Filename
1313548
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