Title :
Interferometric 3-D position measurement system
Author :
Barron, R. ; Cheung, D. ; Barnes, T.
Author_Institution :
Dept. of Phys., Auckland Univ., New Zealand
Abstract :
In this paper, we have developed an interferometeric system for measuring three-dimensional position, which measure x, y and z directions separately. This system produces a single data set from which all three positions can be derived analytically. The zero position of the system does not need to be reset before a measurement can be made, and the position does not require tracking between measurements.
Keywords :
light interferometry; measurement errors; optical sensors; position measurement; interferometric system; measurement error; three-dimensional position measurement; zero position; Arm; Difference equations; Interference; Least squares methods; Mirrors; Optical imaging; Optical interferometry; Phase measurement; Phase shifting interferometry; Position measurement;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313548
