DocumentCode
3178352
Title
Dispenser Cathode Activation Behavior Relative to Surface Porosity as Seen in SEM Images
Author
Tarter, J.O. ; Dawson, R.C. ; Williams, B.C.D. ; Khan, M.O.
Author_Institution
Semicon Assoc., Lexington
fYear
2007
fDate
15-17 May 2007
Firstpage
1
Lastpage
2
Abstract
This study reports on the initial activation behavior of dispenser cathodes with smeared pores, normal porosity, and with no visible pores, as viewed using an SEM.
Keywords
cathodes; coatings; electron emission; inspection; osmium; porosity; scanning electron microscopy; surface phenomena; Os; SEM image inspection; dispenser cathode activation behavior; emission behavior; normal porosity; osmium coatings; smeared pores; surface porosity; Cathodes; Coatings; Inspection; Production; Surface contamination; Test facilities; Transistors; Activation; Coatings; Dispenser cathode; Emission; Porosity; SEM Inspection;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location
Kitakyushu
Print_ISBN
1-4244-0633-1
Type
conf
DOI
10.1109/IVELEC.2007.4283254
Filename
4283254
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