DocumentCode
3178691
Title
Non-flat and limited-area cathodes emission modeling
Author
Munro, E. ; Zhu, X. ; Rouse, J. ; Katsap, V.
Author_Institution
MEBS, Ltd., London
fYear
2007
fDate
15-17 May 2007
Firstpage
1
Lastpage
2
Abstract
LaB6 emitters in e-beam tools are shaped as truncated cones, and may have limited emitting area surrounded by anti-emission coating. We report successful application of SOURCE software by MEBS, Ltd. to modeling these cathodes´ emission.
Keywords
amplifiers; coating techniques; LaB6 emitters; SOURCE software; antiemission coating; e-beam tools; limited-area cathode emission modeling; Application software; Cathodes; Coatings; Current density; Electronic mail; Lithography; Optical computing; Shape; Software tools; Thermionic emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location
Kitakyushu
Print_ISBN
1-4244-0633-1
Type
conf
DOI
10.1109/IVELEC.2007.4283275
Filename
4283275
Link To Document