DocumentCode
3179711
Title
Dynamics of laser ablation in SiC
Author
Medvid, A.
Author_Institution
Riga Tech. Univ., Latvia
fYear
2003
fDate
22-27 June 2003
Firstpage
572
Abstract
The aim of our work is to study dynamics of laser ablation in 6H-SiC at threshold intensity of laser radiation.
Keywords
laser ablation; optical materials; silicon compounds; wide band gap semiconductors; 6H-SiC; SiC; laser ablation dynamics; laser radiation threshold intensity; Laser ablation; Laser beams; Laser modes; Laser theory; Optical pulses; Optical surface waves; Semiconductor lasers; Silicon carbide; Surface emitting lasers; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN
0-7803-7734-6
Type
conf
DOI
10.1109/CLEOE.2003.1313634
Filename
1313634
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