DocumentCode
3179745
Title
Heat-affected zone measurement of copper ablated with femtosecond laser pulses
Author
Hirayama, Yoichi ; Obara, Minoru
Author_Institution
Dept. of Electron. & Electr. Eng., Keio Univ., Yokohama, Japan
fYear
2003
fDate
22-27 June 2003
Firstpage
574
Abstract
In this paper, we would like to report on the heat-affected zone of metallic bulk crystal of Cu ablated with femtosecond Ti:sapphire laser. Due to the heat effects induced by laser pulses, the ablated bottom area is partially converted into the amorphous metals from the crystalline metals. The laser-ablated area etched using argon ion etching apparatus is measured by XRD.
Keywords
X-ray diffraction; argon; copper; high-speed optical techniques; laser ablation; optical materials; sapphire; solid lasers; sputter etching; thermo-optical effects; titanium; Al2O3:Ti; Ar; Cu; XRD; amorphous metals; argon ion etching apparatus; copper metallic bulk crystal; crystalline metals; femtosecond Ti:sapphire laser; femtosecond laser pulses ablation; heat effects; heat-affected zone measurement; laser-ablated area etching; Amorphous materials; Chemical lasers; Copper; Crystallization; Etching; Laser ablation; Laser theory; Optical pulses; Pulse measurements; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN
0-7803-7734-6
Type
conf
DOI
10.1109/CLEOE.2003.1313636
Filename
1313636
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