Laser test of adhesion of thin metal films on glass substrate

Author

Fedenev, A.V. ; Alekseev, S.B. ; Goncharenko, I.M. ; Koval, N.N. ; Lipatov, E.I. ; Orlovskii, V.M. ; Tarasenko, V.F. ; Shulepov, M.A.

Author_Institution

High Current Electron. Inst., Tomsk, Russia

fYear

2003

fDate

22-27 June 2003

Firstpage

583

Abstract

In this paper, it is suggested to use pulsed laser radiation to define adhesion of thin metallic films to the substrate and surface defects detection. The preliminary experimental data on Xe- and XeCl-lasers interaction with thin films of metals deposited on glass using technology of vacuum-arc evaporation are presented in the paper. Threshold laser radiation power densities necessary for film detachment from the substrate are determined. Thus, a possibility of testing of thin film adhesion by focused pulsed laser irradiation with known power distribution over cross-section has been demonstrated.

Keywords

adhesion; gas lasers; high-speed optical techniques; laser beam effects; metallic thin films; optical films; optical glass; vacuum deposited coatings; xenon compounds; Xe; Xe-laser; XeCl; XeCl-laser interaction; adhesion; film detachment; glass substrate; laser testing; power distribution; pulsed laser radiation; surface defect detection; thin film adhesion; thin metal films; threshold laser radiation power density; vacuum-arc evaporation; Adhesives; Glass; Optical pulses; Power lasers; Pulsed laser deposition; Radiation detectors; Sputtering; Substrates; Surface emitting lasers; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on

Print_ISBN

0-7803-7734-6

Type

conf

DOI

10.1109/CLEOE.2003.1313645

Filename

1313645