Teflon sputtering under pulsed CO2-laser irradiation

Teflon plate is irradiated by pulsed CO₂ laser. A crater with even edges without traces of melt or blackening was formed after irradiation of the teflon plate surface by focussed pulsed radiation of CO₂-laser with p.r.r. of ∼1 Hz. Increasing of PTFE surface temperature resulted in increase of efficiency of teflon mass removed from the crater. Increasing of teflon target surface temperature or laser pulse duration results in greater amount of PTFE mass sputtered per shot, increase in particle sizes and appearance of fiber-like formations. Teflon sputtering velocities and powder particles distribution by size at pulse duration of 100 ns and 15 μs and specific power of 10⁸ and 10⁶ W/cm², correspondingly, have been define.