Cathodoluminescent properties of ZnSiO2:Ti thin films grown by pulse laser deposition

This research work is aimed to experimental investigations of cathodoluminescent (CL) parameters, optical characteristics and morphological changes of Ti-doped ZnSiO₄ thin films prepared by pulsed laser deposition (PLD), as a function of deposition parameters and thermodynamic conditions. Analysis of the experimental results´ data nave shown that a key role in preparing the ZnSiO₄:Ti thin films with stoichiometrical composition and good CL emission parameters play the substrate temperature, the oxygen pressure, the distance from the target to the substrate, the deposition rates and a the fluence of the laser radiation. We used a scanning electron microscope for the investigation of the morphology of films grown at the constant deposition temperature and different deposition rate.