DocumentCode
3179994
Title
Development of All-metal Field Emitter Arrays for high Current Applications
Author
Kirk, Eugenie ; Tsujino, Soichiro ; Sehr, Harald ; Vogel, Thomas ; Gobrecht, Jens ; Ganter, Romain ; Wrulich, Albin
Author_Institution
Paul Scherrer Inst., Villigen
fYear
2007
fDate
15-17 May 2007
Firstpage
1
Lastpage
2
Abstract
We are developing high-current field emitter arrays for the PSI-FEL project. By sputtering into molds and electroplating, we produce metal tips on a metal substrate. The single tip current is ~ 0.1 - 1.0 muA.
Keywords
electroplating; field emitter arrays; substrates; PSI-FEL project; all-metal field emitter arrays; electroplating; high current applications; metal substrate; Cathodes; Electron emission; Field emitter arrays; Laboratories; Nanotechnology; Optical arrays; Sputtering; Substrates; Thermal conductivity; X-ray lasers; field emitter array; metal film; mold;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location
Kitakyushu
Print_ISBN
1-4244-0633-1
Type
conf
DOI
10.1109/IVELEC.2007.4283345
Filename
4283345
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