Experimental Study on 100GHz Two-Step LIGA-based Backward Wave Devices

Author

So, J.K. ; Shin, Y.M. ; Jang, K.H. ; Won, J.H. ; Srivastava, A. ; Sattorov, M.A. ; Park, G.S. ; Kim, J.H. ; Chang, S.S.

Author_Institution

Seoul Nat. Univ., Seoul

fYear

2007

fDate

15-17 May 2007

Firstpage

1

Lastpage

2

Abstract

Two 100 GHz backward wave oscillators are being developed using two-step deep-etch X-ray lithography (LIGA) fabrication. Based on previous experiments, beam transmission issue was resolved in two ways by modifying the magnetic confinement system and the beam tunnel size. The coupled cavity BWO (CCBWO) is numerically predicted to have start- oscillation current of 30 mA and produce output power of 4 Watts at the beam condition of about 12 kV and 50 mA.

Keywords

X-ray lithography; backward wave oscillators; cavity resonators; millimetre wave oscillators; backward wave oscillators; beam tunnel size; coupled cavity BWO; current 30 mA; frequency 100 GHz; magnetic confinement system; power 4 W; two-step LIGA-based backward wave devices; two-step deep-etch X-ray lithography fabrication; Circuit testing; Coupling circuits; Fabrication; Frequency; Laboratories; Optical coupling; Oscillators; Physics; Power generation; Programmable logic arrays; Backward Wave Oscillator; Microfabrication; X-ray Deep Etch Lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics Conference, 2007. IVEC '07. IEEE International

Conference_Location

Kitakyushu

Print_ISBN

1-4244-0633-1

Type

conf

DOI

10.1109/IVELEC.2007.4283369

Filename

4283369