DocumentCode
3181000
Title
An Analysis of Material Choices for Capacitive Microaccelerometers
Author
Kushnir, Yuri ; Teslyuk, Vasyl ; Turchenko, P.
Author_Institution
Lviv Polytech. Nat. Univ., Lviv
fYear
2007
fDate
23-26 May 2007
Firstpage
11
Lastpage
11
Abstract
In this paper, microaccelerometer sensitivity upon material admixtures has been considered. The ANSYS aided analysis allows proclamation of tuning possibilities for accelerometer development on stages before manufacturing.
Keywords
CAD; accelerometers; capacitive sensors; micromechanical devices; microsensors; stress analysis; ANSYS aided analysis; CAD systems; MEMS; capacitive microaccelerometers; material admixtures variation; material deformation; stress analysis; Accelerometers; CADCAM; Capacitance; Computer aided manufacturing; Gravity; Microelectromechanical systems; Micromechanical devices; Silicon carbide; Stress; Testing; CAD; MEMS; accelerometer; material;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location
Lviv-Polyana
Print_ISBN
978-966-553-614-7
Type
conf
DOI
10.1109/MEMSTECH.2007.4283414
Filename
4283414
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