Design and Fabrication of Microactuators and Sensors for MEMS

Author

Puchades, Ivan ; Pearson, Robert ; Fuller, Lynn F. ; Gottermeier, Sara ; Lyshevski, Sergey E.

Author_Institution

Rochester Inst. of Technol., Rochester

fYear

2007

fDate

23-26 May 2007

Firstpage

38

Lastpage

44

Abstract

This paper reports the results for various microelectromechanical systems, devices and structures fabricated using bulk and surface micromachined processes. These microelectromechanical systems (MEMS) are designed and fabricated at the Semiconductor Micro-Fabrication Facility Laboratory at Rochester Institute of Technology. The microactuators and sensors are designed and fabricated for proof-of-concept lab-on-a-chip systems. The experimental results, which include testing, evaluation and characterization of microelectromechanical actuators and sensors, are reported.

Keywords

lab-on-a-chip; microactuators; micromachining; microsensors; MEMS; bulk micromachining; lab-on-a-chip; microactuators; microelectromechanical systems; sensors; surface micromachining; Actuators; Fabrication; Lab-on-a-chip; Laboratories; Microactuators; Microelectromechanical systems; Micromechanical devices; Sensor phenomena and characterization; Sensor systems; Testing; ICs; MEMS; microactuator; sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on

Conference_Location

Lviv-Polyana

Print_ISBN

978-966-553-614-7

Type

conf

DOI

10.1109/MEMSTECH.2007.4283421

Filename

4283421