The Development of Model for Parameters for MEMS Operating Reliability Determination

Author

Melnyk, Mykhaylo ; Teslyuk, Vasyl ; Farmaha, Ihor ; Karkulyovsky, Volodymyr ; Moroz, Svitlana

Author_Institution

Lvov Polytech. Nat. Univ., Lvov

fYear

2007

fDate

23-26 May 2007

Firstpage

131

Lastpage

132

Abstract

Reliability is a critical issue in any industrial and consumer product development. The products using MEMS technology is no exception. The central issue of reliability is that no matter how sophisticated a product is designed and manufactured, it becomes useless if it fails to deliver the designed performance during the expected lifetime. In this paper, the mathematical model for determination of MEMS reliability parameters is presented. As an example a micro device consisting of n sensors, n information processing channels and n actuators. Reliability of this system depends on reliability of all its elements.

Keywords

micromechanical devices; product design; product development; reliability; MEMS; information processing channels; product design; product development; reliability parameter determination; Actuators; Aircraft manufacture; Airports; Information processing; Manufacturing industries; Manufacturing processes; Micromechanical devices; Power system modeling; Power system reliability; Sensor systems; MEMS; design; reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on

Conference_Location

Lviv-Polyana

Print_ISBN

978-966-553-614-7

Type

conf

DOI

10.1109/MEMSTECH.2007.4283445

Filename

4283445