DocumentCode :
3181602
Title :
Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor
Author :
Trang, Hoang ; Benech, Ph ; Rey, Patrice ; Vaudaine, M.-H. ; Lemaitre-Auger, Pierre ; Danel, J.-S. ; Robert, Philippe
Author_Institution :
CEA-LETI, Grenoble
fYear :
2007
fDate :
23-26 May 2007
Firstpage :
142
Lastpage :
147
Abstract :
The design, modeling, fabrication process of a novel AIN/SiO2/Si surface acoustic wave (SAW) pressure sensor are introduced. Self temperature compensation structure is given. Special attention is made on the different possible multilayer structures that could be used, trade-off between parameters of pressure sensor.
Keywords :
aluminium compounds; compensation; multilayers; pressure sensors; silicon; silicon compounds; surface acoustic wave sensors; AlN-SiO2-Si; AlN-SiO2-Si - Interface; SAW pressure sensor fabrication; multilayer structures; self temperature compensation structure; surface acoustic wave pressure sensor design; Acoustic sensors; Acoustic waves; Antenna measurements; Biosensors; Frequency; Nonhomogeneous media; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; SAW; pressure sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
Type :
conf
DOI :
10.1109/MEMSTECH.2007.4283449
Filename :
4283449
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3181602
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