• DocumentCode
    3181602
  • Title

    Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor

  • Author

    Trang, Hoang ; Benech, Ph ; Rey, Patrice ; Vaudaine, M.-H. ; Lemaitre-Auger, Pierre ; Danel, J.-S. ; Robert, Philippe

  • Author_Institution
    CEA-LETI, Grenoble
  • fYear
    2007
  • fDate
    23-26 May 2007
  • Firstpage
    142
  • Lastpage
    147
  • Abstract
    The design, modeling, fabrication process of a novel AIN/SiO2/Si surface acoustic wave (SAW) pressure sensor are introduced. Self temperature compensation structure is given. Special attention is made on the different possible multilayer structures that could be used, trade-off between parameters of pressure sensor.
  • Keywords
    aluminium compounds; compensation; multilayers; pressure sensors; silicon; silicon compounds; surface acoustic wave sensors; AlN-SiO2-Si; AlN-SiO2-Si - Interface; SAW pressure sensor fabrication; multilayer structures; self temperature compensation structure; surface acoustic wave pressure sensor design; Acoustic sensors; Acoustic waves; Antenna measurements; Biosensors; Frequency; Nonhomogeneous media; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; SAW; pressure sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
  • Conference_Location
    Lviv-Polyana
  • Print_ISBN
    978-966-553-614-7
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2007.4283449
  • Filename
    4283449
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3181602