Title :
Using Petri Nets in Capacitive Microaccelerometers Design
Author :
Zaharyuk, Roman ; Teslyuk, Vasyl ; Karkulyovskyy, Volodymyr
Abstract :
Proposes the use of Petri nets during computer-aided design of microaccelerometers on the system level and presents an example of using Petri nets for inter-digital microaccelerometers.
Keywords :
Petri nets; accelerometers; capacitive sensors; electronic design automation; microsensors; CAD; Petri nets; capacitive microaccelerometers design; computer-aided design; interdigital microaccelerometer; Acceleration; Accelerometers; Design automation; Information analysis; Micromachining; Petri nets; Sensor systems; Time measurement; Velocity measurement; Vibration measurement; Capacitive microaccelerometer; Petri net;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007. International Conference on
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-553-614-7
DOI :
10.1109/MEMSTECH.2007.4283451
