3D structure of an insect-based microrobot with an external skeleton

The authors describe the concept of making a microrobot with an external skeleton like the structure of an insect, as well as its implementation using rigid plates and elastic joints. A large-scale model consisting of plastic plates, springs, and solenoids is shown to demonstrate this motion. Moreover, several microsized models were built on silicon wafers by using polysilicon as rigid plates and polyimide as elastic joints