DocumentCode
3181744
Title
InP 2D nano-structures fabricated by two-time laser holography
Author
Ohira, T. ; Segawa, T. ; Nagai, K. ; Takahashi, S. ; Utaka, K. ; Nakao, M.
Author_Institution
Dept. of Electron., Inf. & Commun. Eng., Waseda Univ., Tokyo, Japan
fYear
2001
fDate
2001
Firstpage
268
Lastpage
271
Abstract
We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples
Keywords
III-V semiconductors; etching; holography; indium compounds; infrared spectra; laser materials processing; nanotechnology; optical fabrication; periodic structures; photonic band gap; reflectivity; sputter etching; (100)-InP substrates; 500 nm; InP; InP 2D nano-structures; InP-InGaAsP; dry etching; periodic structure; photonic crystals; reflectivity; square lattice patterns; triangular lattice patterns; two-dimensional nano-structures; two-time laser holography; wet etching; Holography; Indium phosphide; Lattices; Optical filters; Optical materials; Optical resonators; Optical surface waves; Reflectivity; Resists; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2001. IPRM. IEEE International Conference On
Conference_Location
Nara
ISSN
1092-8669
Print_ISBN
0-7803-6700-6
Type
conf
DOI
10.1109/ICIPRM.2001.929109
Filename
929109
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