Modeling and Compensating of Piezoelectric Actuator Hysteresis in Photolithography

Piezoelectric materials have many advantages, such as: high stiffness, a high frequency response, and high resolution. It has been widely used in reducing vibration system, but hysteresis confines its use. This paper establish model of piezoelectric material´s hysteresis at different turning point according to comparability of hysteresis curve. The simulation result´s error less than 2 percent contrast to testing data. Piezoelectric materials´ output is linear against input controlling by the model.