DocumentCode :
3184644
Title :
Atomic Force Microscopy Sensing Using Multiple Modes
Author :
Zhang, Jiangbo ; Xi, Ning ; Li, Guangyong ; Su, Chanmin
Author_Institution :
Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI
fYear :
2006
fDate :
9-15 Oct. 2006
Firstpage :
3928
Lastpage :
3933
Abstract :
An atomic force microscope (AFM) explores the topography of a sample surface using a micro-sized flexible cantilever, which works as a flexible robot arm. The flexible cantilever is controlled to keep vibrating when an AFM works in the tapping mode. The cantilever is modeled as a flexible beam instead of a point mass system in this paper. The nonlinear interaction force between the tip and sample surface is also modeled. A simulation environment is developed to analyze the dynamics of cantilevers using the flexible beam model. Simulation results confirm that the flexible beam model can represent the system more accurately than the point-mass model. It has been shown that lower modes are more sensitive to changes of surface topography or surface materials when the cantilever is driven to vibrate at a higher harmonic mode. At the same time, this simulation environment also provides a more accurate way to validate the design of a new AFM probe and AFM controller than simulation packages which use the point-mass model
Keywords :
atomic force microscopy; beams (structures); cantilevers; flexible manipulators; manipulator dynamics; atomic force microscopy; flexible robot arm; microsized flexible cantilever; nonlinear interaction force; point mass system; Atomic force microscopy; Distributed parameter systems; Force measurement; Instruments; Intelligent robots; Manipulators; Probes; Resonant frequency; Structural beams; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Robots and Systems, 2006 IEEE/RSJ International Conference on
Conference_Location :
Beijing
Print_ISBN :
1-4244-0258-1
Electronic_ISBN :
1-4244-0259-X
Type :
conf
DOI :
10.1109/IROS.2006.281825
Filename :
4059020
Link To Document :
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