DocumentCode
318493
Title
IEE Microengineering Technologies and How to Exploit Them (Ref. 1997/076)
fYear
1997
fDate
35528
Abstract
The following topics were dealt with: micromachining; LIGA processes; focused ion beams in microscale fabrication; anode manufacture for magnetrons; polymer micromoulding technologies; photochemical machining and electroforming
Keywords
micromachining; LIGA processes; anode manufacture; electroforming; focused ion beams; magnetrons; microengineering technologies; micromachining; microscale fabrication; photochemical machining; polymer micromoulding technologies;
fLanguage
English
Publisher
iet
Conference_Titel
Microengineering Technologies and How to Exploit Them (Digest No: 1997/076), IEE Colloquium on
Conference_Location
Birmingham
Type
conf
Filename
640892
Link To Document