An on wafer probe for measurements at 140 GHz

The on wafer probe described here is being designed in collaboration between the Cavendish Laboratory, University of Cambridge and the Electronics Laboratories, University of Kent at Canterbury and is part of a research project on the design of M³ICs at 140 GHz. With the on wafer probe it is possible to contact devices which are situated on a wafer substrate and which are in coplanar waveguide technology (CPW) in order to measure their scattering parameters. The probe is used together with a measurement system using a dielectric waveguide multistate reflectometer which are both mounted on a positioning unit of a probe station