Design and fabrication of pyrolyzed polymer micro and nano structures

Author

Naka, Keisuke ; Konishi, Satoshi

Author_Institution

Graduate Sch. of Sci. & Eng., Ritsumeikan Univ., Kyoto

fYear

2005

fDate

7-9 Nov. 2005

Firstpage

103

Lastpage

108

Abstract

This paper deals with pyrolyzed polymers as a kind of carbon materials obtained by a pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O₂. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer micro and nano structures. Polymer MEMS structures can be transformed into pyrolyzed polymer MEMS structures for various applications. This work focuses on design and fabrication of pyrolyzed polymer micro and nano structures through a combination of micromachining of polymers and following pyrolysis. Pyrolyzed polymer micro and nano bridge structures are fabricated for demonstrations. 100 nm wide bridge could be successfully fabricated as the fine free structure. Furthermore, pyrolyzed parylene-C micro pillar allay was realized as vertical free standing pyrolyzed polymer structures

Keywords

carbon; heat treatment; micromechanical devices; nanotechnology; polymer structure; pyrolysis; 100 nm; MEMS; carbon materials; heat treatment; micromachining; polymer nano structures; pyrolysis process; pyrolyzed parylene-C micro pillar allay; pyrolyzed polymer micro structures; Bridge circuits; Carbon dioxide; Conducting materials; Conductivity; Fabrication; Micromachining; Micromechanical devices; Organic materials; Polymers; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-9482-8

Type

conf

DOI

10.1109/MHS.2005.1589971

Filename

1589971