Title :
A Si micro conveyer system based on electrostatic comb-drive actuators
Author :
Pham, Phuc Hong ; Dao, Dzung Viet ; Amaya, Satoshi ; Kitada, Ryoji ; Shipeng, Li ; Sugiyama, Susumu
Author_Institution :
Ritsumeikan Univ., Shiga
Abstract :
We report a design and fabrication of micro conveyer system (MCS) based on electrostatic comb-drive actuators using SOI wafer. This MCS consists of linear comb actuator, rotational comb actuator, micro containers, and ratchet mechanism. Micro containers, used for carrying micro and nano samples such as protein, cells, are moved by comb-actuators through ratchet teeth. Each MCS, which has dimension of 1 times 1 cm2, is fabricated by using ICP-RIE and vapor HF etching techniques. The fabricated comb actuators were tested for electrostatic effect. Experiment results were very close to the simulation results
Keywords :
conveyors; electrostatic actuators; etching; micromachining; silicon; silicon-on-insulator; SOI wafer; Si micro conveyer system; electrostatic comb-drive actuators; linear comb actuator; micro containers; ratchet mechanism; rotational comb actuator; vapor HF etching techniques; Assembly systems; Containers; Electrostatic actuators; Etching; Fabrication; Hafnium; Hydraulic actuators; Micromechanical devices; Silicon; Teeth;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-9482-8
DOI :
10.1109/MHS.2005.1589979
