Title :
Silicon dew point hygrometer model
Author_Institution :
Inst. of Electron. Syst., Warsaw Univ. of Technol., Poland
Abstract :
The paper presents a new complex model of silicon dew point hygrometer. Construction of fabricated hygrometer is briefly shown. Next the set of model equations is presented. The model describes: behavior of water vapor contained in measured gas (saturated vapor partial pressure, sub cooled water phenomenon), water mass transport (condensation and evaporation processes), heat transport across measurement head, silicon dew detector and regulator characteristics. The numerical dew point hygrometer model realized in SIMULINK environment is presented. Finally, comparison of measured data and model responses is discussed
Keywords :
elemental semiconductors; hygrometers; semiconductor device models; silicon; SIMULINK; Si; condensation; evaporation; gas humidity measurement; heat transport; numerical model; saturated vapor partial pressure; semiconductor mirror; silicon dew point hygrometer; subcooled water phenomenon; water mass transport; water vapor; Detectors; Heat pumps; Heat transfer; Humidity; Mirrors; Regulators; Silicon; Temperature; Thermoelectric devices; Water heating;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2001. IMTC 2001. Proceedings of the 18th IEEE
Conference_Location :
Budapest
Print_ISBN :
0-7803-6646-8
DOI :
10.1109/IMTC.2001.929515
