Silicon dew point hygrometer model

Author

Weremczuk, J.

Author_Institution

Inst. of Electron. Syst., Warsaw Univ. of Technol., Poland

Volume

3

fYear

2001

fDate

2001

Firstpage

1823

Abstract

The paper presents a new complex model of silicon dew point hygrometer. Construction of fabricated hygrometer is briefly shown. Next the set of model equations is presented. The model describes: behavior of water vapor contained in measured gas (saturated vapor partial pressure, sub cooled water phenomenon), water mass transport (condensation and evaporation processes), heat transport across measurement head, silicon dew detector and regulator characteristics. The numerical dew point hygrometer model realized in SIMULINK environment is presented. Finally, comparison of measured data and model responses is discussed

Keywords

elemental semiconductors; hygrometers; semiconductor device models; silicon; SIMULINK; Si; condensation; evaporation; gas humidity measurement; heat transport; numerical model; saturated vapor partial pressure; semiconductor mirror; silicon dew point hygrometer; subcooled water phenomenon; water mass transport; water vapor; Detectors; Heat pumps; Heat transfer; Humidity; Mirrors; Regulators; Silicon; Temperature; Thermoelectric devices; Water heating;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2001. IMTC 2001. Proceedings of the 18th IEEE

Conference_Location

Budapest

ISSN

1091-5281

Print_ISBN

0-7803-6646-8

Type

conf

DOI

10.1109/IMTC.2001.929515

Filename

929515