DocumentCode
3188192
Title
On-wall in-tube inserted thermal flexible micro sensors for measuring mass-flow
Author
Tan, Z.Y. ; Shikida, M. ; Hirota, M. ; Sato, K.
Author_Institution
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Japan
fYear
2005
fDate
7-9 Nov. 2005
Firstpage
255
Lastpage
260
Abstract
A new thermal mass flow micro sensor that uses polyimide film as the substrate material and thermal insulation has been developed. The working principle of thermal micro sensors is the calorimetric method, using Au as the resistance material. We describe a new inner wall surface-mounted structure. This design can decrease power consumption and improve measurement accuracy. The TCR value of the heater is 0.0026 K-1, and a response time of less than 0.4 μs.
Keywords
flow measurement; microsensors; temperature sensors; thermal insulation; Au; calorimetric method; inner wall surface-mounted structure; mass-flow measurement; on-wall in-tube inserted thermal flexible micro sensors; polyimide film; resistance material; substrate material; thermal insulation; thermal mass flow micro sensor; Electrical resistance measurement; Energy consumption; Gold; Insulation; Polyimides; Power measurement; Substrates; Surface resistance; Thermal resistance; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on
Print_ISBN
0-7803-9482-8
Type
conf
DOI
10.1109/MHS.2005.1590000
Filename
1590000
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