Development of free-surface microstereolithography with ultra-high resolution to fabricate hybrid 3-D microdevices

Author

Kobayashi, Kengo ; Ikuta, Koji

Author_Institution

Dept. of Micro Nano Syst. Eng., Nagoya Univ.

fYear

2005

fDate

7-9 Nov. 2005

Firstpage

273

Lastpage

278

Abstract

We have developed the free-surface microstereolithography with higher resolution. We have found that the meniscus at the squeegee affects the laminate resolution. Thus, to reduce this meniscus we have improved the squeegee, which laminates thin layers of UV curable resin on the solidified resin in free-surface microstereolithography apparatus. We have varied the angle of it and coated it with the fluorocarbon resin. As the result, we could fabricate a microstructure with 10 um laminate resolution. Moreover, we have succeeded in fabricating the prototype of the biochemical LSI chip by using the modified apparatus. This chip enables us more application in the field of biochemistry and medicine

Keywords

laminates; large scale integration; micromechanical devices; nanolithography; resins; stereolithography; UV curable resin; biochemical LSI chip; fluorocarbon resin; free-surface microstereolithography development; hybrid 3D microdevice fabrication; laminate resolution; solidified resin; ultra-high resolution; Biochemistry; Laminates; Laser beams; Lenses; Microstructure; Resins; Solid lasers; Surface emitting lasers; Switches; Systems engineering and theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2005 IEEE International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-9482-8

Type

conf

DOI

10.1109/MHS.2005.1590003

Filename

1590003