Development of free-surface microstereolithography with ultra-high resolution to fabricate hybrid 3-D microdevices

We have developed the free-surface microstereolithography with higher resolution. We have found that the meniscus at the squeegee affects the laminate resolution. Thus, to reduce this meniscus we have improved the squeegee, which laminates thin layers of UV curable resin on the solidified resin in free-surface microstereolithography apparatus. We have varied the angle of it and coated it with the fluorocarbon resin. As the result, we could fabricate a microstructure with 10 um laminate resolution. Moreover, we have succeeded in fabricating the prototype of the biochemical LSI chip by using the modified apparatus. This chip enables us more application in the field of biochemistry and medicine