DocumentCode
318832
Title
IEE Half-Day Colloquium on Computer Modelling Techniques for Microstructures (Ref. No.97/077)
fYear
1997
fDate
35557
Abstract
The following topics were dealt with: integrated modelling techniques for micro-devices; computer modelling techniques for microstructures; coupled mechanical and electrostatic microactuator analysis; design simulation system; stress modelling
Keywords
micromechanical devices; computer modelling techniques; coupled mechanical/electrostatic analysis; design simulation system; integrated modelling techniques; micro-devices; microactuator analysis; micromechanical structures; microstructures; stress modelling;
fLanguage
English
Publisher
iet
Conference_Titel
Computer Modelling Techniques for Microstructures (Digest No: 1997/077), IEE Half-Day Colloquium on
Conference_Location
London
Type
conf
Filename
643746
Link To Document