Modeling of On-Chip Spiral Inductors

This paper presents two accurate modeling methods for on-chip inductors, including the substrate parasitic effects, skin effect, mutual inductance between any two parallel wires parasitic capacitances resulted form the proximity effect between wires, and the substrate losses due to the eddy current. The model parameters have been extracted from MATLAB and then the distributed circuits have been simulated in Hspice, obtaining the inductance values. Furthermore, several simulations have been done by IE3D, an electromagnetic simulator.