DocumentCode
3189010
Title
High resolution electron microscopy from imaging towards measuring
Author
Van Aert, S. ; den Dekker, A.J. ; van den Bos, A. ; Van Dyck, D.
Author_Institution
Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands
Volume
3
fYear
2001
fDate
2001
Firstpage
2081
Abstract
High resolution electron microscopy is discussed as a measuring, rather than an imaging technique. It is shown that the interpretation of the images could greatly benefit from a quantitative instead of a qualitative approach accompanied by quantitative statistical experimental design
Keywords
design of experiments; electron microscopy; image resolution; optimisation; parameter estimation; atom positions measurement; high resolution electron microscopy; measuring technique; parameter estimation; point resolution; precision based optimisation; quantitative model-based HREM; quantitative statistical experimental design; Atomic measurements; Design for experiments; Electron microscopy; High-resolution imaging; Image resolution; Instruments; Material properties; Nanostructured materials; Position measurement; Superconducting materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 2001. IMTC 2001. Proceedings of the 18th IEEE
Conference_Location
Budapest
ISSN
1091-5281
Print_ISBN
0-7803-6646-8
Type
conf
DOI
10.1109/IMTC.2001.929564
Filename
929564
Link To Document