DocumentCode :
3190676
Title :
A case study of applying regional level-set formulation to post-sawing LED wafer inspection
Author :
Li, Chun-Hsi ; Chang, Chuan-Yu ; Jeng, MuDer ; Yang-Ting Jeng
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Ocean Univ., Keelung, Taiwan
fYear :
2010
fDate :
10-13 Oct. 2010
Firstpage :
2745
Lastpage :
2752
Abstract :
With level set formulation, new contours can system that utilizes the evolution of zero-level contours for segmenting post-sawing wafer is proposed in this study. The system also utilizes a regional formulation, which improves the level set segmentation in images with intensity inhomogeneity. With a proper configuration, the initial contour can be given in arbitrary positions in the background. Hence, a small fixed initial contour is applied to evolve the zero-level set to automatically segment the wafer. Without necessity of applying any filtering in advance, the inspection can be performed directly on the segmented results. The experimental results demonstrate the effectiveness of the proposed approach.
Keywords :
image segmentation; inspection; light emitting diodes; production engineering computing; semiconductor device manufacture; defect inspection system; fixed initial contour; image segmentation; intensity inhomogeneity; level set segmentation; post-sawing LED wafer inspection; regional level-set formulation; zero-level contour; Image segmentation; Inspection; Legged locomotion;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Systems Man and Cybernetics (SMC), 2010 IEEE International Conference on
Conference_Location :
Istanbul
ISSN :
1062-922X
Print_ISBN :
978-1-4244-6586-6
Type :
conf
DOI :
10.1109/ICSMC.2010.5642506
Filename :
5642506
Link To Document :
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