Novel MEMS Electrothermal Actuators & Its Application

This paper presents the design and Finite Element Model (FEM) simulation of a novel electrothermal microactuators and arrays. It is a single material microactuator which deflects at its tips by differential thermal expansion of its constituent parts. The electrothermal actuator consists of three thin arms, three thin blades and two electrical connection pads. The goal of this coupled electrothermal actuator design was to multiply the force by adding the individual contributions of all the three actuators. The difference in magnitude of blade deflections depends on the geometrical characteristics of the actuators. The thermal deformation and thermal stability are easily controllable. The simulation employing ANSYS/Multiphysics software results include force, deflection, thermal stress, ideal electrothermal actuator and array geometries. The main advantage of this electrothermal actuator is large deflection of blades with very low actuation voltage in comparison with electrostatic actuators. A typical application in a micromirror is shown to illustrate the utility of these actuators and arrays.