• DocumentCode
    319221
  • Title

    Improvement of near-field scanning optical microscope and observation of optical waveguide

  • Author

    Kim, Ki Hyun ; Lee, Byongho ; Jhe, Wonho

  • Author_Institution
    Dept. of Phys., Seoul Nat. Univ., South Korea
  • Volume
    2
  • fYear
    1997
  • fDate
    10-13 Nov 1997
  • Firstpage
    52
  • Abstract
    Optical near-fields are widely studied to overcome the diffraction limit of conventional optics. Near-field scanning optical microscopes (NSOM), one of the optical near-field instruments, was fabricated and improved. The shear force mechanism is used for the tip-sample distance control which is basic requirement in near-field applications. In this work, the detection mechanism and feedback control of shear force were improved by a fiber detection scheme and a digital feedback controller
  • Keywords
    optical feedback; optical fibres; optical microscopes; optical scanners; detection mechanism; diffraction limit; digital feedback controller; feedback control; fiber detection scheme; near-field applications; near-field scanning optical microscope; near-field scanning optical microscopes; optical near-field instrument; optical near-fields; optical waveguide; shear force mechanism; tip-sample distance control; Adaptive control; Etching; Force feedback; Instruments; Optical feedback; Optical fibers; Optical microscopy; Optical sensors; Optical waveguides; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
  • Conference_Location
    San Francisco, CA
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-3895-2
  • Type

    conf

  • DOI
    10.1109/LEOS.1997.645235
  • Filename
    645235