DocumentCode
3192414
Title
A Randomized Greedy Algorithm for the Pattern Fill Problem for DFM Applications
Author
Mukherjee, Maharaj ; Chakraborty, Kanad
Author_Institution
IBM Res., Hopewell Junction
fYear
2008
fDate
17-19 March 2008
Firstpage
344
Lastpage
347
Abstract
This work deals with the dummy fill and negative fill insertion problem with constraints on the minimum and maximum pattern density within a moving rectangular window. It is shown that the general class of such problems is at least NP-hard. A greedy randomized algorithm for this problem is proposed, and its proof of convergence and some experimental results are presented. More detailed account of our implementation and results are available in [7].
Keywords
design for manufacture; greedy algorithms; design for manufacture; dummy fill insertion; greedy algorithm; negative fill insertion; Algorithm design and analysis; Containers; Convergence; Design for manufacture; Greedy algorithms; Manufacturing; Planarization; Resists; Shape; USA Councils;
fLanguage
English
Publisher
ieee
Conference_Titel
Quality Electronic Design, 2008. ISQED 2008. 9th International Symposium on
Conference_Location
San Jose, CA
Print_ISBN
978-0-7695-3117-5
Type
conf
DOI
10.1109/ISQED.2008.4479753
Filename
4479753
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