Optimization of parameters for CMOS MEMS resonant pressure sensors

Micro machined resonant pressure sensors have rapidly grown into a major type of MEMS products over the past two decades. This paper presents the mathematical modelling of squeeze film damping in a MEMS resonant pressure sensor by MATLAB wherein structural and performance parameters of the device i.e. quality factor, capacitance and sensitivity are optimized relative to pressure. The change in quality factor is aimed to be optimized in order to enhance the modelling of the sensor and improve the overall sensitivity of the complete architecture. The sensor mass being 0.4 μg was designed with optimum structural parameters of 140 μm × 140 μm × 8 μm having 6 × 6 perforations along the row and column of the plate respectively to yield an enhanced quality factor of 62 and reduced damping coefficient of 4.2 μN-s/m at atmospheric pressure.