SystemC-AMS simulation of a biaxial accelerometer based on MEMS model order reduction

This paper proposes a framework for system-level modeling and simulation of a Micro Electro-Mechanical System (MEMS). We show how a reduced-order model of MEMS can be integrated into SystemC-AMS. We propose the use of an external linear algebra library and alternative time integration method. Both are used to customize a Timed Data Flow (TDF) module to address MEMS modeling. Experiments are conducted on a biaxial accelerometer to verify its response to a ramp impulse. Our implementation runs about twice as fast as the state space resolution currently implemented in SystemC-AMS 2.0. Results highlight potential improvements of SystemC-AMS standard to correctly simulate the analog behavior of MEMS devices.