DocumentCode :
3193585
Title :
An Axially Symetric Finite Element Modelling For The Electromagnetic Behavior in an Rf Plasma Device
Author :
Mekideche, M.R. ; Feliachi, M.
Author_Institution :
L. R. T. I/ I.u. T B. P. 420 44606 Saint-Nazaire Cedex France
fYear :
1993
fDate :
13-16 April 1993
Keywords :
Coils; Conductivity; Electromagnetic devices; Electromagnetic modeling; Finite element methods; Plasma applications; Plasma density; Plasma devices; Plasma temperature; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
Type :
conf
DOI :
10.1109/INTMAG.1993.642758
Filename :
642758
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3193585
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