Title :
Fabrication and test of arrays of langasite microbalances
Author :
Ansorge, E. ; Brose, A. ; Schmidt, B. ; Sauerwald, J. ; Fritze, H.
Author_Institution :
Inst. of Micro- & Sensor Syst. (IMOS), Otto-von-Guericke-Univ., Magdeburg, Germany
Abstract :
The design of piezoelectricaly actuated plano-convex shaped resonators has been studied to optimize their Q-factor and signal spectrum at high temperatures. The investigated arrays of thickness-shear-mode (TSM) resonators consist of langasite, a high temperature stable material. As viscoelastic damping and an increasing conductivity decreases the Q-factor at elevated temperatures, design optimizations have to counteract these effects. Two and three dimensional finite element (FE) models have been solved to analyze the resonant behavior and the effects of energy confinement at different temperatures depending on geometry. The separation and suppression of spurious modes, the improvement of the Q-factor and the confinement of the TSM could be shown. The simulated effects of energy confinement could be proofed by impedance measurements.
Keywords :
Q-factor; crystal resonators; damping; electrical conductivity; finite element analysis; microbalances; viscoelasticity; La3Ga5SiO14; conductivity; high temperature Q-factor; high temperature signal spectrum; langasite microbalance arrays; piezoelectricaly actuated plano-convex shaped resonators; thickness-shear-mode resonators; three dimensional finite element models; two dimensional finite element models; viscoelastic damping; Biomembranes; Finite element methods; Resonant frequency; Temperature; Temperature measurement; Temperature sensors;
Conference_Titel :
Electronic System-Integration Technology Conference (ESTC), 2010 3rd
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-8553-6
Electronic_ISBN :
978-1-4244-8554-3
DOI :
10.1109/ESTC.2010.5642800
