DocumentCode
3196162
Title
Instrumentation and methodology for MEMS testing, reliability assessment and failure analysis
Author
De Wolf, Ingrid
Author_Institution
Mirosystems Dept., IMEC, Leuven, Belgium
Volume
1
fYear
2004
fDate
16-19 May 2004
Firstpage
57
Abstract
In this paper some instrumentation and methodology for testing, reliability assessment and failure analysis of MEMS is discussed. Well-known instruments such as atomic force microscopy and scanning electron microscopy are mentioned, but the main focus is on specific MEMS instrumentation.
Keywords
atomic force microscopy; micromechanical devices; scanning electron microscopy; semiconductor device packaging; semiconductor device reliability; semiconductor device testing; MEMS testing; atomic force microscopy; failure analysis; reliability assessment; scanning electron microscopy; Atomic force microscopy; Failure analysis; Frequency; Instruments; Micromechanical devices; Packaging; Radiofrequency microelectromechanical systems; Switches; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2004. 24th International Conference on
Print_ISBN
0-7803-8166-1
Type
conf
DOI
10.1109/ICMEL.2004.1314558
Filename
1314558
Link To Document