DocumentCode
3197381
Title
Three-dimensional potential distribution model in channel of small geometry MOSFET with Gauss impurity distribution
Author
Ramovic, R. ; Krijestorac, S. ; Lukic, P.
Author_Institution
Dept. of Microelectron., Belgrade Univ., Serbia
Volume
1
fYear
2004
fDate
16-19 May 2004
Firstpage
307
Abstract
In this paper the original three-dimensional potential distribution model in the channel of a small geometry MOSFET with Gauss impurity distribution is developed. By using the proposed model, simulations were performed. Obtained results are graphically presented and discussed. This model can be used for small-geometry MOSFET parameters optimization.
Keywords
MOSFET; impurity distribution; semiconductor device models; Gauss impurity distribution; small geometry MOSFET; three-dimensional potential distribution model; Boundary conditions; Equations; Gaussian channels; Gaussian distribution; Geometry; Impurities; Integrated circuit modeling; MOSFET circuits; Solid modeling; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2004. 24th International Conference on
Print_ISBN
0-7803-8166-1
Type
conf
DOI
10.1109/ICMEL.2004.1314624
Filename
1314624
Link To Document