Mesa diaphragm-based Fabry-Perot optical MEMS pressure sensor

Author

Ge, Yi-Xian ; Wang, Ming ; Yan, IIai-Tao

Author_Institution

Jiangsu Key Lab. of Opto-Electron. Technol., Nanjing Normal Univ., Nanjing, China

fYear

2008

fDate

7-9 Nov. 2008

Firstpage

1

Lastpage

4

Abstract

An optical MEMS pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity.

Keywords

Fabry-Perot interferometers; fibre optic sensors; microsensors; pressure sensors; Fabry-Perot interference; Fabry-Perot optical MEMS pressure sensor; mesa membrane; Biomembranes; Fabry-Perot; Interference; Mechanical sensors; Micromechanical devices; Mirrors; Optical fiber sensors; Optical fibers; Optical sensors; Silicon; F-P interference; MEMS; Optical fiber sensor; mesa structure; parallelism;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Sensors Conference, 2008. APOS '08. 1st Asia-Pacific

Conference_Location

Chengdu

Print_ISBN

978-1-4244-2131-2

Electronic_ISBN

978-1-4244-2132-9

Type

conf

DOI

10.1109/APOS.2008.5226325

Filename

5226325