• DocumentCode
    3198443
  • Title

    On-chip circuit for massively parallel BTI characterization

  • Author

    Silva, M. B da ; Kaczer, B. ; Van der Plas, G. ; Wirth, G.I. ; Groeseneken, G.

  • Author_Institution
    Imec, Leuven, Belgium
  • fYear
    2011
  • fDate
    16-20 Oct. 2011
  • Firstpage
    90
  • Lastpage
    93
  • Abstract
    This work proposes an array-based evaluation circuit for efficient and massively parallel characterization of Bias Temperature Instability (BTI). This design is highly efficient when studying the BTI time-dependent variability in deeply-scaled devices, where hundreds of devices should be tested in order to obtain a statistically significant sample size. The circuit controls stress and measurement times for accurate statistical characterization, making sure all the tested devices have the same stress and recovery times. It significantly improves both area and measurement time. The circuit layout is laid out on the new 28nm node IMEC technology.
  • Keywords
    integrated circuit design; integrated circuit testing; BTI time-dependent variability; IMEC technology; array-based evaluation circuit; bias temperature instability; circuit layout; deeply-scaled devices; on-chip circuit; parallel BTI characterization; size 8 nm; statistical characterization; Degradation; Pollution measurement; Stress; Stress measurement; Temperature measurement; Transistors; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report (IRW), 2011 IEEE International
  • Conference_Location
    South Lake Tahoe, CA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4577-0113-9
  • Type

    conf

  • DOI
    10.1109/IIRW.2011.6142596
  • Filename
    6142596