Title :
On-chip circuit for massively parallel BTI characterization
Author :
Silva, M. B da ; Kaczer, B. ; Van der Plas, G. ; Wirth, G.I. ; Groeseneken, G.
Author_Institution :
Imec, Leuven, Belgium
Abstract :
This work proposes an array-based evaluation circuit for efficient and massively parallel characterization of Bias Temperature Instability (BTI). This design is highly efficient when studying the BTI time-dependent variability in deeply-scaled devices, where hundreds of devices should be tested in order to obtain a statistically significant sample size. The circuit controls stress and measurement times for accurate statistical characterization, making sure all the tested devices have the same stress and recovery times. It significantly improves both area and measurement time. The circuit layout is laid out on the new 28nm node IMEC technology.
Keywords :
integrated circuit design; integrated circuit testing; BTI time-dependent variability; IMEC technology; array-based evaluation circuit; bias temperature instability; circuit layout; deeply-scaled devices; on-chip circuit; parallel BTI characterization; size 8 nm; statistical characterization; Degradation; Pollution measurement; Stress; Stress measurement; Temperature measurement; Transistors; Voltage measurement;
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2011 IEEE International
Conference_Location :
South Lake Tahoe, CA
Print_ISBN :
978-1-4577-0113-9
DOI :
10.1109/IIRW.2011.6142596