Title :
Contactless material deposition by jetting for heterogeneous system integration
Author :
Becker, K.-F. ; Kurz, A. ; Reichl, H.C. ; Koch, M. ; Bauer, J. ; Braun, T.
Author_Institution :
Tech. Univ. Berlin, Berlin, Germany
Abstract :
During the last years, jetting processes for higher viscosity materials have gained widespread interest in microelectronics manufacturing. Main reasons for this interest are high throughput/productivity of jetting, contactless material deposition, high volume precision and freely designable deposition patterns. Especially the higher viscosity materials are of interest for the integration of a variety of heterogeneous components as needed for the assembly of System in Package. As knowledge on jetting behavior of these materials is not generally available, a study combining material analysis and process development has been conducted with the aim to demonstrate the limits of jet dispensing for higher viscosity materials.
Keywords :
integrated circuit manufacture; system-in-package; viscosity; contactless material deposition; deposition patterns; heterogeneous system integration; jetting processes; material analysis; microelectronics manufacturing; process development; system in package assembly; viscosity materials; Throughput;
Conference_Titel :
Electronic System-Integration Technology Conference (ESTC), 2010 3rd
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-8553-6
Electronic_ISBN :
978-1-4244-8554-3
DOI :
10.1109/ESTC.2010.5642929