• DocumentCode
    3198744
  • Title

    Contactless material deposition by jetting for heterogeneous system integration

  • Author

    Becker, K.-F. ; Kurz, A. ; Reichl, H.C. ; Koch, M. ; Bauer, J. ; Braun, T.

  • Author_Institution
    Tech. Univ. Berlin, Berlin, Germany
  • fYear
    2010
  • fDate
    13-16 Sept. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    During the last years, jetting processes for higher viscosity materials have gained widespread interest in microelectronics manufacturing. Main reasons for this interest are high throughput/productivity of jetting, contactless material deposition, high volume precision and freely designable deposition patterns. Especially the higher viscosity materials are of interest for the integration of a variety of heterogeneous components as needed for the assembly of System in Package. As knowledge on jetting behavior of these materials is not generally available, a study combining material analysis and process development has been conducted with the aim to demonstrate the limits of jet dispensing for higher viscosity materials.
  • Keywords
    integrated circuit manufacture; system-in-package; viscosity; contactless material deposition; deposition patterns; heterogeneous system integration; jetting processes; material analysis; microelectronics manufacturing; process development; system in package assembly; viscosity materials; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic System-Integration Technology Conference (ESTC), 2010 3rd
  • Conference_Location
    Berlin
  • Print_ISBN
    978-1-4244-8553-6
  • Electronic_ISBN
    978-1-4244-8554-3
  • Type

    conf

  • DOI
    10.1109/ESTC.2010.5642929
  • Filename
    5642929